TRIS(DIETHYLAMIDO)(ETHYLIMIDO)TANTALUM(V) 三(二乙基氨基)(乙基酰亚胺基)钽(V)
CAS 67313-80-8 MFCD03093879
化学结构图
SMILES: CCN=[Ta](N(CC)CC)(N(CC)CC)N(CC)CC
化学属性
| Mol. Formula | C2H5NTa(N(C2H5)2)3 |
|---|---|
| Mol. Weight | 440.40 |
| Density | 1.31 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.51(lit.) |
别名和识别编码
| Chemical Name | Tris(diethylamido)(ethylimido)tantalum(V) |
|---|---|
| Synonym | 三(二乙氨基)(乙基亚氨基)钽(V) 三(二乙基氨基)(乙基酰亚胺基)钽(V) |
| MDL Number | MFCD03093879 |
| PubChem Substance ID | 24873976 |
| CAS Number | 67313-80-8 |
| Chemical Name Translation | 三(二乙基氨基)(乙基酰亚胺基)钽(V) |
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分类
- {SNA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Materials Science, Micro/NanoElectronics, Tantalum, Vapor Deposition Precursors
- {SA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Materials Science, Micro/NanoElectronics, Tantalum, Vapor Deposition Precursors
- {SNA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Micro/NanoElectronics, Tantalum, Vapor Deposition Precursors, 材料科学
相关文献及参考
安全信息
- P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 远离热源/火花/明火/热的表面。——禁止吸烟。
- P310 Immediately call a POISON CENTER or doctor/physician. 立即呼救解毒中心或医生/医师。
- P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防护手套/防护服/眼睛的保护物/面部保护物。
- P305+P351+P338
- H314 Causes severe skin burns and eye damage 导致严重的皮肤灼伤和眼睛损伤
- H225 Highly flammable liquid and vapour 高度易燃液体和蒸气
GHS Symbol
- S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后，立即用大量水冲洗并征求医生意见；
- S27 Take off immediately all contaminated clothing 立即脱掉全部污染的衣服；
- S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴适当的防护服、手套和眼睛/面保护；
- S16 Keep away from sources of ignition - No smoking 远离火源，禁止吸烟；
- R11 Highly flammable 非常易燃
- R34 Causes burns 会导致灼伤
