Dimethylbis(Pentamethylcyclopentadienyl)Zirconium(IV) 双(五甲基环戊二烯)二甲基锆
CAS 67108-80-9 MFCD01863658
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分类
- {SNA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Micro/NanoElectronics, Vapor Deposition Precursors, Zirconium, 材料科学
- {SNA} CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Materials Science, Micro/NanoElectronics,