Tris(Tert-Butoxy)Silanol 三(叔丁氧基)硅烷醇
CAS 18166-43-3 MFCD00271024
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- {SNA} 14: Silicon, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Chemical Synthesis, Micro/NanoElectronics, Organometallic Reagents, Organosilicon, Silanols, Silicon, Vapor Deposition Precursors, 材料科学
- {SNA} Micro/NanoElectronics, Silanes, Silicon, Solution Deposition Precursors, 材料科学
- {SNA} Materials Science, Micro/NanoElectronics, Silanes, Silicon, Solution Deposition Precursors
- {SA} Materials Science, Micro/NanoElectronics, Silanes, Silicon, Solution Deposition Precursors