Tetrakis(ethylmethylamino)hafnium(IV) TEMAH 四(乙基甲基氨基)铪(IV)
CAS 352535-01-4 MFCD03427130
化学结构图
SMILES: CCN(C)[Hf](N(C)CC)(N(C)CC)N(C)CC
化学属性
| Mol. Formula | [(CH3)(C2H5)N]4Hf |
|---|---|
| Mol. Weight | 410.90 |
| Boiling Point | 78 °C/0.01 mmHg(lit.) |
| Density | 1.324 g/mL at 25 °C(lit.) |
| Melting Point | <;-50 °C |
| Flash Point | 11°(52°F) |
| TSCA | Yes |
| Appearance | colorless to yellow liq. |
| Stability | moisture sensitive |
| Danger-Level | - |
| pH | -:- |
| Redox | - |
别名和识别编码
| Chemical Name | Tetrakis(ethylmethylamino)hafnium(IV) TEMAH |
|---|---|
| Synonym | TEMAH TEMAH 四(乙基甲基氨基)铪(IV) 四(乙基甲基胺基)铪(IV) 四(乙基甲基氨基)铪(IV) |
| CAS Number | 352535-01-4 |
| PubChem Substance ID | 329764168 |
| MDL Number | MFCD03427130 |
| Chemical Name Translation | 四(乙基甲基氨基)铪(IV) |
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分类
- {SNA} CVD and ALD Precursors by Metal, Hafnium, Micro/NanoElectronics, Vapor Deposition Precursors, 材料科学
- {SNA} CVD and ALD Precursors by Metal, Hafnium, Materials Science, Micro/NanoElectronics, Vapor Deposition Precursors
- {SNA} 72: Hafnium, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Hafnium,
- {SNA} 72: Hafnium, CVD and ALD Precursors Packaged for Deposition Systems, CVD and ALD Precursors by Metal, Catalysis and Inorganic Chemistry, Chemical Synthesis, Hafnium, Micro/NanoElectronics, Vapor Deposition Precursors, 材料科学
- {SNA} 72: Hafnium,
相关文献及参考
- Rose, M.; Niinisto, J.; Endler, I.; Bartha, J. W.; Kucher, P.; Ritala, M. ACS Appl. Mat. Inter. 2 , 347, (2010) 摘要
安全信息
GHS Symbol
- H315 Causes skin irritation 会刺激皮肤
- H335 May cause respiratory irritation 可能导致呼吸道刺激
- H319 Causes serious eye irritation 严重刺激眼睛
- H225 Highly flammable liquid and vapour 高度易燃液体和蒸气
- H261 In contact with water releases flammable gas 与水接触时释放可燃气体。
- P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 远离热源/火花/明火/热的表面。——禁止吸烟。
- P305+P351+P338
- P422 Store contents under… 存储目录在…之下。
- P231+P232
- P261 Avoid breathing dust/fume/gas/mist/vapours/spray. 避免吸入粉尘/烟/气体/烟雾/蒸汽/喷雾。
- S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后，立即用大量水冲洗并征求医生意见；
- S30 Never add water to this product 切勿将水加入该产品中；
- S37 Wear suitable gloves 戴适当手套；
- S16 Keep away from sources of ignition - No smoking 远离火源，禁止吸烟；
- S36 Wear suitable protective clothing 穿戴适当的防护服；
- R11 Highly flammable 非常易燃
- R36/37/38 Irritating to eyes, respiratory system and skin 对眼睛、呼吸系统和皮肤有刺激性
- R14 Reacts violently with water 遇水会猛烈反应
